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Proceedings Paper

Fluid-flow-rate metrology: laboratory uncertainties and traceabilities
Author(s): G. E. Mattingly
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Paper Details

Date Published: 1 March 1991
PDF: 16 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48932
Show Author Affiliations
G. E. Mattingly, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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