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Proceedings Paper

Microcomputer-based real-time monitoring and control of single-wafer processing
Author(s): John R. Hauser; Ronald S. Gyurcsik
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Paper Abstract

Low cost microcomputers are an attractive approach for monitoring and control of future semiconductor processing equipment. A wide variety of low-cost off-the-shelfl/O boards are available for use with industry standard PCs. Such an approach is being implemented in a three-module singlewafer cluster-tool approach for forming a gate stack of oxide nitride and polysilicon. This work discusses hardware and software approaches for such a cluster tool and discusses some of the advantages of in-situ real-time process monitoring and control.

Paper Details

Date Published: 1 March 1991
PDF: 12 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48928
Show Author Affiliations
John R. Hauser, North Carolina State Univ. (United States)
Ronald S. Gyurcsik, North Carolina State Univ. (United States)

Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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