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Proceedings Paper

Real-time automation of a dry etching system
Author(s): Robert H. McCafferty
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Paper Abstract

EfForts olthc IBM General I'echno1ogy 1)ivision in Essex Junction, Vermont to automate the investigation of dry etching processes employed in the manufacture of semiconductor memory chips are described. This paper overviews the technical case for the project, then proceeds to qualitatively detail the control strategy and installation ground rules, as well as the project's data processing and signal conditioning equipment, tool and process instrumentation, and driving software. The architecture and performance of the resulting system are then discussed. Further, the technical conclusions and implications of this system's success are presented.

Paper Details

Date Published: 1 March 1991
PDF: 9 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48927
Show Author Affiliations
Robert H. McCafferty, IBM/General Technology Div. (United States)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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