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Proceedings Paper

Focused ion beam nano-machined structures for strain analysis in MEMS devices
Author(s): Biao Li; Bai Xu; Huimin Xie; Robert E. Geer; James Castracane; Xiaosong Tang
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Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, ; doi: 10.1117/12.489240
Show Author Affiliations
Biao Li, Univ. at Albany (United States)
Bai Xu, Univ. at Albany (United States)
Huimin Xie, Univ. at Albany (United States)
Robert E. Geer, Univ. at Albany (United States)
James Castracane, Univ. at Albany (United States)
Xiaosong Tang, Cornell Univ. (United States)


Published in SPIE Proceedings Vol. 4928:
MEMS/MOEMS Technologies and Applications
Guofan Jin; John S. McKillop; Kazuhiro Hane, Editor(s)

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