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Proceedings Paper

LH electron cyclotron resonance plasma source
Author(s): K.-H. Kretschmer; Gerhard Lorenz; G. Castrischer; I. Kessler; P. Baumann
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Paper Details

Date Published: 1 March 1991
PDF: 7 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48919
Show Author Affiliations
K.-H. Kretschmer, Leybold AG (Germany)
Gerhard Lorenz, Leybold AG (Germany)
G. Castrischer, Leybold AG (Germany)
I. Kessler, Leybold AG (Germany)
P. Baumann, Leybold AG (Germany)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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