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Proceedings Paper

Enhanced process control of submicron contact definition
Author(s): Wayne H. Ostrout; Sean Hunkler; Steven D. Ward
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Paper Details

Date Published: 1 March 1991
PDF: 14 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48910
Show Author Affiliations
Wayne H. Ostrout, Motorola, Inc. (United States)
Sean Hunkler, Motorola, Inc. (United States)
Steven D. Ward, Motorola, Inc. (United States)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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