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Proceedings Paper

MTF of photolithographic hologram
Author(s): Lurong Guo; Yongkang Guo; Xiao-Chun Zhang
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Paper Abstract

This paper points out that the formation of photolithographic hologram (PLH) is a transfer process of two steps described below. Its modulation transfer function (MTF) is the product of the two steps. The former belongs to the traditional photosensitive holographic recording material. The latter belongs to the plasma etch transfer process which can be controlled while PLH is foiming. Therefore the modulation of the second step may be magnified. Furthermore we point out that this special performance of PLH would lead us to find a new way for embossed holography and the fabrication of HOEs.

Paper Details

Date Published: 1 March 1991
PDF: 5 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48907
Show Author Affiliations
Lurong Guo, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Xiao-Chun Zhang, Sichuan Univ. (China)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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