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Proceedings Paper

Oxygen reactive ion etching of polymers: profile evolution and process mechanisms
Author(s): Wolfgang Pilz; Joachim Janes; Karl Paul Muller; Joachim Pelka
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Paper Details

Date Published: 1 March 1991
PDF: 11 pages
Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); doi: 10.1117/12.48905
Show Author Affiliations
Wolfgang Pilz, Fraunhofer-Institut fuer Mikrostrukturtechnik (Germany)
Joachim Janes, Fraunhofer-Institut fuer Mikrostrukturtechnik (Germany)
Karl Paul Muller, Fraunhofer-Institut fuer Mikrostrukturtechnik (Germany)
Joachim Pelka, Fraunhofer-Institut fuer Mikrostrukturtechnik (Germany)


Published in SPIE Proceedings Vol. 1392:
Advanced Techniques for Integrated Circuit Processing
James A. Bondur; Terry R. Turner, Editor(s)

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