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Proceedings Paper

Toward massive parallel reading of sensitive mechanical microsensors
Author(s): Fabien Amiot; Jean Paul Roger; Albert-Claude Boccara
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Paper Abstract

We describe a new approach for the parallel reading of the response of micromechanical sensors in array using an interferential imaging method coupled with a multichannel lock-in detection. The mechanical response of each sensor is deduced from the image of their topography. The goal is the detection of stress changes through the measurement of induced topography changes between loaded sensors and reference sensors. A measurement of the out-of-plane displacement field is a sensitive and reliable method to determine the mechanical stress in microcantilevers. In this study gold-covered SiO2 cantilevers have been used as sensors and a displacement measurement sensitivity of 230 pm has been achieved with no averaging. Such a value is equivalent to a stress change sensitivity better than 0.001 MPa for our application. The fields of application extend from DNA biochips to environmental sensors.

Paper Details

Date Published: 22 July 2003
PDF: 6 pages
Proc. SPIE 4958, Advanced Biomedical and Clinical Diagnostic Systems, (22 July 2003); doi: 10.1117/12.488680
Show Author Affiliations
Fabien Amiot, Lab. d'Optique Physique, CNRS (France)
Ecole Superieure de Physique Chimie Industrielles (France)
LMT-Cachan, CNRS (France)
Jean Paul Roger, Ecole Superieure de Physique et de Chimie Industriell (France)
Albert-Claude Boccara, Ecole Superieure de Physique et de Chimie Industriell (France)

Published in SPIE Proceedings Vol. 4958:
Advanced Biomedical and Clinical Diagnostic Systems
Tuan Vo-Dinh; Warren S. Grundfest; David A. Benaron; Gerald E. Cohn, Editor(s)

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