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Proceedings Paper

Analysis of the accuracy of aerostatic slideway made from granite
Author(s): Jinian Li
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Paper Abstract

This paper describes a method to analyze overall accuracy of an aerostatic slideway made from granite. Working equations of the aerostatic slideway and precision theory of fine mechanics are used to derive a series of aerostatic slideway calculating equations. It presents the view of multiple. The final measuring results are given by Laser Transduser System 5501A. The horizontal error σx = +/- 0.06"(m.s.e.). The vertical error σx = +/- 0.09"(m.s.e.). This kind of aerostatic slideway made from granite has been used in photoetching machines.

Paper Details

Date Published: 1 December 1991
PDF: 5 pages
Proc. SPIE 1533, Optomechanics and Dimensional Stability, (1 December 1991); doi: 10.1117/12.48855
Show Author Affiliations
Jinian Li, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1533:
Optomechanics and Dimensional Stability
Roger A. Paquin; Daniel Vukobratovich, Editor(s)

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