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Proceedings Paper

Microdisplacement positioning system for a diffraction grating ruling engine
Author(s): Hou-Min Yang; Xiaolin Wang; Yinxian Zhang
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Paper Abstract

This paper presents a new high-accuracy micro-displacement positioning system controlled by a diffraction grating interferometer. The principle and technique are given, based on which micro-displacements are measured by an interfering system consisting of a spectral grating. In order that the interferometer is stable and reliable for several days and nights, the interfering signals are program-controlled. The movement of the diamond is even and smooth due to locked phase of the bridge generator with frequency division of crystal oscillation. The locked phase of the interfering signals with the bridge is controlled by Bang-Bang and PID modes. The movement accuracy of the engine is measured and analyzed by interpolation. The division error: (sigma) <3.1 nm. The grating quality can be determined from the spectral contour obtained by Fourier transform. As a result, it is corresponding with that obtained by spectral means.

Paper Details

Date Published: 1 December 1991
PDF: 8 pages
Proc. SPIE 1533, Optomechanics and Dimensional Stability, (1 December 1991); doi: 10.1117/12.48854
Show Author Affiliations
Hou-Min Yang, Changchun Institute of Optics and Fine Mechanics (China)
Xiaolin Wang, Changchun Institute of Optics and Fine Mechanics (China)
Yinxian Zhang, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 1533:
Optomechanics and Dimensional Stability
Roger A. Paquin; Daniel Vukobratovich, Editor(s)

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