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Proceedings Paper

Finline technology for millimeter-wave MEMS
Author(s): Jeffrey S. Fu; Jiaoyun Zhou; Yilong Lu; Jianguo Ma; Zhongxiang Shen
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Paper Abstract

Recent development of finline 35 GHz MEM modules like Gunn oscillator, PIN switch, and filters at Nanyang Technological University will be discussed. The design tools and measurement equipments like Advanced Design System (ADS), High Frequency Structure Simulator (HFSS) and Vector Network Analyzer (VNA) are used extensively throughout the work.

Paper Details

Date Published: 24 April 2003
PDF: 8 pages
Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); doi: 10.1117/12.487702
Show Author Affiliations
Jeffrey S. Fu, Nanyang Technological Univ. (Singapore)
Jiaoyun Zhou, Nanyang Technological Univ. (Singapore)
Yilong Lu, Nanyang Technological Univ. (Singapore)
Jianguo Ma, Nanyang Technological Univ. (Singapore)
Zhongxiang Shen, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 5116:
Smart Sensors, Actuators, and MEMS
Jung-Chih Chiao; Vijay K. Varadan; Carles Cané, Editor(s)

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