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Proceedings Paper

Fabrication of micro and cyclic structure by using diffractive optics and femtosecond laser
Author(s): Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda
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Paper Abstract

Interfered femtosecond laser beams split by a diffractive optics was used to fabricate micro and cyclic structures. The process was done on the surface of samples, as polystyrene, slide glass, sapphire, and gold thin film. On each sample, a line of periodic dot structure with a period of about 6.25 μm was fabricated. The length of workpiece was 6 mm at maximum, and which is longest structure fabricated by a laser ablation using interfered femtosecond laser beams.

Paper Details

Date Published: 19 February 2003
PDF: 4 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486591
Show Author Affiliations
Yoshiki Nakata, Kyushu Univ. (Japan)
Tatsuo Okada, Kyushu Univ. (Japan)
Mitsuo Maeda, Kyushu Univ. (Japan)

Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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