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Proceedings Paper

Deposition of LiNbO3 waveguide by pulsed-laser deposition
Author(s): Yoshiki Nakata; Soichiro Gunji; Youhei Shimizu; Tatsuo Okada; Mitsuo Maeda
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Paper Abstract

LiNbO3 thin films were deposited by pulsed-laser deposition (PLD) method. Crystalline and transparent films were deposited on sapphire substrates at 400 °C and in 100 mtorr of oxygen gas pressure. The waveguide properties, which were waveguide mode and loss, were measured by prism coupling method. Droplet less film was obtained with low ablation laser fluence and without scanning of ablation laser. The smallest waveguide loss was 32.9 dB/cm at present.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486589
Show Author Affiliations
Yoshiki Nakata, Kyushu Univ. (Japan)
Soichiro Gunji, Kyushu Univ. (Japan)
Youhei Shimizu, Kyushu Univ. (Japan)
Tatsuo Okada, Kyushu Univ. (Japan)
Mitsuo Maeda, Kyushu Univ. (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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