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Proceedings Paper

Toward nano-process applications with laser-cooled silicon atoms
Author(s): Hiroshi Kumagai; Yuichi Asakawa; Katsumi Midorikawa; Minoru Obara
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Paper Abstract

We have developed an all-solid-state 252nm coherent light source for laser cooling of silicon atoms with tow-stage highly efficient frequency conversions with external cavities. With the coherent light source, it is possible to manipulate the atomic motion of the silicon atoms towards nano-process applications. In this paper, deflection, collimation, and axial velocity selection of the silicon atomic beam with the coherent light source are discussed.

Paper Details

Date Published: 19 February 2003
PDF: 4 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486587
Show Author Affiliations
Hiroshi Kumagai, Institute of Physical and Chemical Research (RIKEN) (Japan)
Yuichi Asakawa, Institute of Physical and Chemical Research (RIKEN) (Japan)
Keio Univ. (Japan)
Katsumi Midorikawa, Institute of Physical and Chemical Research (RIKEN) (Japan)
Minoru Obara, Keio Univ. (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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