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Proceedings Paper

Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials
Author(s): Y. Cheng; Koji Sugioka; Masashi Masuda; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa
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Paper Abstract

Large scale, true three dimensional (3D) microchannel structures have been fabricated in photosensitive glass by femtosecond (fs) laser. In general, the microchannel fabricated inside glass by scanning focal spot of fs laser perpendicularly to the laser propagation direction gets an elliptical shape with a large aspect ratio of its cross section, which is undesirable to most of micro total analysis systems (μ-TAS) or micro fluidic devices. In this paper, we describe how to improve the aspect ratio of the fabricated microchannel by using advanced irradiation methods of fs laser.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486586
Show Author Affiliations
Y. Cheng, Institute of Physical and Chemical Research (RIKEN) (Japan)
Koji Sugioka, Institute of Physical and Chemical Research (RIKEN) (Japan)
Tokyo Univ. of Science (Japan)
Masashi Masuda, Institute of Physical and Chemical Research (RIKEN) (Japan)
Masako Kawachi, HOYA Continuum Corp. (Japan)
Kazuhiko Shihoyama, HOYA Continuum Corp. (Japan)
Koichi Toyoda, Tokyo Univ. of Science (Japan)
Katsumi Midorikawa, Institute of Physical and Chemical Research (RIKEN) (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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