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Proceedings Paper

Development of beam pointing compensating optical system for aspheric beam shaper of PWB laser drilling system
Author(s): Koki Ichihashi; Daiji Narita; Yasuhiro Mizutani; Katsuichi Ukita; Hidehiko Karasaki
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Paper Abstract

In a PWB laser drilling system, an aspheric beam shaper, which converts single-mode Gaussian beam into beam with uniform irradiance profile is widely used. This beam shaper is very sensitive to decentering of the input beam, which is caused by the instability of beam pointing. It degrades the irradiance profile uniformity of the output beam and the processing quality. To solve this problem, we develop a beam pointing compensation optical system. This system contains a newly designed collimator which have a function to project the origin of the pointing vector of the laser beam to the input surface of the shaper in addition to the conventional function to control the diameter and the wavefront curvature of the laser beam. We analyzed the performance of the collimator by simulation, and confirmed that the irradiance distribution of output beam was not degraded by the instability of the beam pointing. Also, we confirmed its effects by the optical experiments.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486581
Show Author Affiliations
Koki Ichihashi, Matsushita Industrial Equipment Co., Ltd. (Japan)
Daiji Narita, Matsushita Industrial Equipment Co., Ltd. (Japan)
Yasuhiro Mizutani, Matsushita Industrial Equipment Co., Ltd. (Japan)
Katsuichi Ukita, Matsushita Industrial Equipment Co., Ltd. (Japan)
Hidehiko Karasaki, Matsushita Industrial Equipment Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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