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Proceedings Paper

Development of multilayer ceramic capacitor by pulsed-laser deposition
Author(s): Satoshi Tsuyuguchi; S. Mustofa; Takao Araki; Minoru Nishida; Takanori Hino
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Paper Abstract

A thin film is a very attractive material in applications for capacitor material. Since the capacitance of multi layer capacitor is proportional to the number of dielectric layer and it is inversely as thickness, making thickness of film thin has a double advantage, in order to enlarge the capacitance. This research was performed thin film sizing and growth control of BaTiO3, which are used as a dielectric. The increase of capacitance is predominant over the present value of 1nF.

Paper Details

Date Published: 19 February 2003
PDF: 4 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486580
Show Author Affiliations
Satoshi Tsuyuguchi, Ehime Univ. (Japan)
S. Mustofa, Ehime Univ. (Japan)
Takao Araki, Ehime Univ. (Japan)
Minoru Nishida, Ehime Univ. (Japan)
Takanori Hino, Niihama National College of Technology (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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