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Proceedings Paper

Decomposition of methylene blue with photocatalytic TiO2 thin films deposited by pulsed-laser deposition
Author(s): Masayuki Okoshi; Yusuke Kosuge; Narumi Inoue; Tsugito Yamashita
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Paper Abstract

Photocatalytic titanium dioxide (TiO2) thin films with large specific surface area were deposited on Si wafers by pulsed laser deposition with sintered TiO2 targets in oxygen gas atmosphere. Angular distributions of the number of droplets and the film thickness were examined. The surface roughness and the film thickness depended on the oxygen gas pressure. Photocatalytic effect of the films deposited at various substrate temperatures was evaluated by photobleaching of methylene-blue-aqueous solution. The TiO2 film deposited at the substrate temperature of 250°C was anatase-type crystal and this film indicated the highest photocatalytic effect.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486577
Show Author Affiliations
Masayuki Okoshi, National Defense Academy (Japan)
Yusuke Kosuge, Kanto Gakuin Univ. (Japan)
Narumi Inoue, National Defense Academy (Japan)
Tsugito Yamashita, Kanto Gakuin Univ. (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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