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Proceedings Paper

Fabrication of well-defined silicon and titanium oxide nanoparticles by laser ablation
Author(s): Nobuhiro Aya; Seisuke Kano; Takafumi Seto; Makoto Hirasawa; Takaaki Orii; Kaname Sakiyama; Hirofumi Shimura
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Paper Abstract

Nanometer-sized particles of silicon and titanium dioxide were generated by Nd:YAG laser ablation of solid substrates in a low pressure atmosphere. A low-pressure differential mobility analyzer (LP-DMA) was used to control the size of generated particles. The LP-DMA and a transmission electron microscopy (TEM) were used to measure the change in size distribution and morphology of nanoparticles with laser power and pressure. Finally, we succeeded to synthesize the almost spherical nanoparticles of 2-50 nm in diameter.

Paper Details

Date Published: 19 February 2003
PDF: 4 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486572
Show Author Affiliations
Nobuhiro Aya, National Institute of Advanced Industrial Science and Technology (Japan)
Seisuke Kano, National Institute of Advanced Industrial Science and Technology (Japan)
Takafumi Seto, National Institute of Advanced Industrial Science and Technology (Japan)
Makoto Hirasawa, National Institute of Advanced Industrial Science and Technology (Japan)
Takaaki Orii, National Institute of Advanced Industrial Science and Technology (Japan)
Kaname Sakiyama, National Institute of Advanced Industrial Science and Technology (Japan)
Hirofumi Shimura, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication

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