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Proceedings Paper

Fabrication of 1-um patterns on fused silica plates by laser-induced backside wet etching (LIBWE)
Author(s): Ximing Ding; Yoshizo Kawaguchi; Hiroyuki Niino; Akira Yabe
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Paper Abstract

Laser-induced backside wet etching of fused silica plates using aqueous solutions of naphthalene-1,3,6-trisulfonic acid trisodium salt (Np) and pyranine (py) was performed upon KrF excimer laser irradiation at 248 nm. The two etching media show different etching behavior with changing laser fluence and medium concentrations. Well-defined line-and-space and grid micropatterns at 1 μm scale were fabricated using an aqueous solution of Np and the etched pattern was free of debris and microcracks.

Paper Details

Date Published: 19 February 2003
PDF: 6 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486571
Show Author Affiliations
Ximing Ding, National Institute of Advanced Industrial Science and Technology (Japan)
Yoshizo Kawaguchi, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)
Akira Yabe, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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