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Proceedings Paper

Experimental study on ceramics processing by using high-power CO2 laser beam
Author(s): Atsuki Yamamoto; Hiroyuki Hayashikawa; Hitoshi Hongu
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Paper Abstract

This paper makes a report on the results of experimental analyses about the relation between drilling performance about alumina ceramics and focusing characteristics, as first step for clarifying of drilling mechanism of ceramics by CO2 laser. The results are as follows: · (1) When the focal point is set inside of the work, the shape of holes is made 50 to 55% deeper and 10 to 15% smaller than these when the focal point is set outside of the work. (The distance between work surface and focal point is +/-0.2mm.) It seems to be able to concentrate higher energy when the focal point is set inside of the work. · (2) Spot diameter under 95 μm with the focusing angle (7.5-8 degrees) is necessary to make deep holes. was clarified. From this, it seems that to make deep holes does not only need higher energy density, but also need smooth elimination of molten work. The result of these analyses was applied to new scribing system to develop scribing performance. The scribing speed of alumina ceramics was improved by 20%.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486557
Show Author Affiliations
Atsuki Yamamoto, Matsushita Industrial Equipment Co., Ltd. (Japan)
Hiroyuki Hayashikawa, Matsushita Industrial Equipment Co., Ltd. (Japan)
Hitoshi Hongu, Matsushita Industrial Equipment Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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