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Proceedings Paper

3D microfabrication in photosensitive glass by femtosecond laser
Author(s): Masashi Masuda; Koji Sugioka; Y. Cheng; Naoko Aoki; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa
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Paper Abstract

We describe a true three dimensional (3D) microfabrication of photosensitive glass by applying a femtosecond (fs) laser which works at fundamental wavelength. First, designed microstructure was written into the glass sample by a tightly focused fs laser beam (wavelength 775nm, pulse width 145±5fs, repetition rate 1kHz); next, this sample underwent a programmed heat treatment; finally it was immersed into 10% hydrofluoric (HF) acid to take an ultrasonic bath. By this approach, true 3D microstructures with embedded microchannels and microcells are directly formed inside the glass matrix, without extra bonding or adhering procedures in those planar fabrication techniques. Such an approach combines the advantages of high precision in laser microfabrication and cost-effectiveness in chemical processing, therefore, could be a promising tool in futuristic manufacture of micro total analysis systems (μ-TAS) and micro fluidic devices.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486548
Show Author Affiliations
Masashi Masuda, Institute of Physical and Chemical Research (RIKEN) (Japan)
Tokyo Univ. of Science (Japan)
Koji Sugioka, Institute of Physical and Chemical Research (RIKEN) (Japan)
Y. Cheng, Institute of Physical and Chemical Research (RIKEN) (Japan)
Naoko Aoki, The Institute of Physical and Chemical Research (RIKEN) (Japan)
Tokyo Univ. of Science (Japan)
Masako Kawachi, HOYA Continuum Corp. (Japan)
Kazuhiko Shihoyama, HOYA Continuum Corp. (Japan)
Koichi Toyoda, Tokyo Univ. of Science (Japan)
Katsumi Midorikawa, Institute of Physical and Chemical Research (RIKEN) (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication

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