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Proceedings Paper

Femtosecond-laser-induced nanostructures formed on hard coatings of TiN and DLC
Author(s): Naoki Yasumaru; Kenzo Miyazaki; Junsuke Kiuchi; Hiroyuki Magara
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Paper Abstract

Linearly- and circularly-polarized femtosecond (fs) Ti:sapphire laser pulses at 800 and 267 nm were focused in air to ablate hard thin films of TiN and DLC deposited on stainless steel plates. The morphology of the thin film surfaces that were ablated by the fs laser pulses at an energy fluence slightly above the ablation threshold was observed and characterized with a field emission-scanning electron microscope. With the linearly-polarized light, arrays of fine slender granular structure were produced on the ablated surface, which were almost oriented to the direction perpendicular to the laser polarization. On the other hand, the circularly-polarized light is found to form fine dot structures on the film surface. The size of these surface structures was 1/10 ~ 1/5 of the laser wavelength used and was observed to decrease with a decrease in the laser wavelength. It should be noted that the size of surface structures observed is much smaller than that of the well-known surface ripple patterns produced by the laser-induced surface electromagnetic wave.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486541
Show Author Affiliations
Naoki Yasumaru, Fukui National College of Technology (Japan)
Kenzo Miyazaki, Kyoto Univ. (Japan)
Junsuke Kiuchi, Eyetec Co., Ltd. (Japan)
Hiroyuki Magara, Industrial Technical Ctr. of Fukui Prefecture (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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