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Proceedings Paper

Nd:YAG laser machining with multilevel resist kinoforms
Author(s): Mats Ekberg; J. Michael Larsson; Aldo Bolle; Sverker Hard
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Paper Abstract

Laser micromachining with ten level resist kinoforms, manufactured by electron-beam lithography, is presented. The kinoforms were shown to have a diffraction efficiency of 68%. One kinoform was used to drill nine diffraction-limited holes simultaneously in a 0.10 mm thick stainless-steel plate. Marking in a silicon wafer was also done.

Paper Details

Date Published: 1 December 1991
PDF: 4 pages
Proc. SPIE 1527, Current Developments in Optical Design and Optical Engineering, (1 December 1991); doi: 10.1117/12.48654
Show Author Affiliations
Mats Ekberg, Chalmers Univ. of Technology (Sweden)
J. Michael Larsson, Chalmers Univ. of Technology (Sweden)
Aldo Bolle, Chalmers Univ. of Technology (Sweden)
Sverker Hard, Chalmers Univ. of Technology (Sweden)


Published in SPIE Proceedings Vol. 1527:
Current Developments in Optical Design and Optical Engineering
Robert E. Fischer; Warren J. Smith, Editor(s)

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