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Proceedings Paper

Femtosecond laser ablation of copper
Author(s): Yeow-Whatt Goh; Yong-Feng Lu; Ming-Hui Hong; Tow Chong Chong
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Paper Abstract

In recent years, femtosecond (fs) laser ablation has attracted much interest in both basic and applied physics, mainly because of its potential application in micromachining and pulsed laser deposition. Ultrashort laser ablation have the capability to ablate materials precisely with little or no collateral damage, even with materials that are impervious to laser energy from conventional pulsed lasers. The extreme intensities and short timescale at which ultrashort pulsed lasers operate differentiate them from other lasers such as nanosecond laser. In this work, we investigate the expansion dynamics of Cu (copper) plasma generated by ultrashort laser ablation of pure copper targets by optically examining the plasma plume. Time-integrated optical emission spectroscopy measurements by using intensified charged couple detector array (ICCD) imaging were used to detect the species present in the plasma and to study the laser-generated plasma formation and evolution. Temporal emission profiles are measured. Our interest in the dynamics of laser-generated copper plasma arises from the fact that copper has been considered as a substitute for Aluminum (Al) interconnects/metallization in ULSI devices (for future technology). It is important to know the composition and behavior of copper plasma species for the understanding of the mechanisms involved and optimizing the micro-machining processes and deposition conditions.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486537
Show Author Affiliations
Yeow-Whatt Goh, Data Storage Institute/National Univ. of Singapore (Singapore)
Yong-Feng Lu, Data Storage Institute/National Univ. of Singapore (Singapore)
National Univ. of Singapore (Singapore)
Ming-Hui Hong, Data Storage Institute/National Univ. of Singapore (Singapore)
Tow Chong Chong, Data Storage Institute/National Univ. of Singapore (Singapore)
National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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