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Proceedings Paper

Optical properties of N-doped diamond-like carbon films synthesized by pulsed-laser deposition
Author(s): Zhi Ying Chen; Jian Ping Zhao; Tatsuya Shinozaki; Toshihiko Ooie; Tetsuo Yano
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Paper Abstract

Optical properties of nitrogen-doped diamond-like carbon films deposited by pulsed laser deposition at room temperature are investigated. Three series of diamond-like carbon films are prepared by KrF excimer laser ablation of graphite with assistance of different nitrogen sources. Series 1: nitrogen gas of 99.999% purity is applied to react with carbon species. Diamond-like carbon films with nitrogen content of ~0.5-1.7 at.% are prepared at different nitrogen gas pressures (10-4-10-1 Pa). Series 2: a radical beam source is used for providing an atomic nitrogen beam. Diamond-like carbon films with nitrogen content of ~1.0-5.4 at.% are synthesized at nitrogen gas pressure of 10-3-10-2 Pa. Series 3: a 3-cm ion source is employed for supplying an active nitrogen ion beam. Diamond-like carbon films with nitrogen content varying from 8.0 to 14.3 at.% are deposited. The optical properties of the synthesized diamond-like carbon films are characterized by ultraviolet-visible spectrometry. Investigation indicates that the different nitrogen sources have different effects on the optical properties of diamond-like carbon films.

Paper Details

Date Published: 19 February 2003
PDF: 5 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486524
Show Author Affiliations
Zhi Ying Chen, National Institute of Advanced Industrial Science and Technology (Japan)
Jian Ping Zhao, National Institute of Advanced Industrial Science and Technology (Japan)
Tatsuya Shinozaki, National Institute of Advanced Industrial Science and Technology (Japan)
Toshihiko Ooie, National Institute of Advanced Industrial Science and Technology (Japan)
Tetsuo Yano, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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