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Proceedings Paper

Characteristics of electric devices made by direct nanoparticle spraying
Author(s): Eiichi Ozawa; Yuji Kawakami; Toshinobu Yoshida; Masaru Iwashina; Kazutoshi Takahashi
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Paper Abstract

Metal nanoparticles films were prepared by a gas deposition technique couple with the nanosecond pulsed Nd:YAG laser ablation of two kinds of metal targets. Two generated nanoparticles were insitu mixed in the near space of the targets in the generation chamber and transported by a helium carrier gas to the deposition chamber and deposited on a substrate to form electric devices such as a resistor, a capacitor, wiring, etc., composed of nanoparticles composites. The electrical resistivity and capacity of the devices were measured. The relationship between the experimental conditions such as ambient pressure and laser fluences and the electrical properties of each device were analyzed. A heater was produced as an example of the application of a resistor.

Paper Details

Date Published: 19 February 2003
PDF: 6 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486523
Show Author Affiliations
Eiichi Ozawa, Vacuum Metallurgical Co., Ltd. (Japan)
Yuji Kawakami, Vacuum Metallurgical Co., Ltd. (Japan)
Toshinobu Yoshida, Vacuum Metallurgical Co., Ltd. (Japan)
Masaru Iwashina, Vacuum Metallurgical Co., Ltd. (Japan)
Kazutoshi Takahashi, Vacuum Metallurgical Co., Ltd. (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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