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Proceedings Paper

Enhancement of debris attachment and atomic redistribution of femtosecond laser ablation using phase-shifted Gaussian beams
Author(s): Hiroki Murata; Masanori Miyazawa; Koichi Toyoda
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Paper Abstract

Femtosecond laser ablation using phase-shifted laser beam is reported. Phase-shifting method is a unique method to modify the Gaussian intensity profile into closely adjacent pair of the high intensity peaks. The phase-shifting was accomplished by the use of reflecting plane-mirror whose plane has a step of quarter of the wavelength. The calculation of intensity profiles using Fresnel diffraction theory shows a steep intensity changes in a very closed area. In the experiment of femtosecond laser ablation using phase-shifted beams, debris attachment has been observed both surround area and the central part corresponding to the phase edge. We discuss the anomalous enhancement of debris attachment at the central part.

Paper Details

Date Published: 19 February 2003
PDF: 4 pages
Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); doi: 10.1117/12.486520
Show Author Affiliations
Hiroki Murata, Tokyo Univ. of Science (Japan)
Masanori Miyazawa, Tokyo Univ. of Science (Japan)
Koichi Toyoda, Tokyo Univ. of Science (Japan)


Published in SPIE Proceedings Vol. 4830:
Third International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Kojiro F. Kobayashi; Koji Sugioka; Reinhart Poprawe; Henry Helvajian, Editor(s)

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