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Proceedings Paper

Microlithographic lens for DUV scanner
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Paper Abstract

This paper describes several kinds of new technologies introduced into the latest microlithographic lens system for Nikon's DUV (Deep Ultra Violet) scanner.

Paper Details

Date Published: 23 December 2002
PDF: 5 pages
Proc. SPIE 4832, International Optical Design Conference 2002, (23 December 2002); doi: 10.1117/12.486476
Show Author Affiliations
Tomoyuki Matsuyama, Nikon Corp. (Japan)
Yuichi Shibazaki, Nikon Corp. (Japan)


Published in SPIE Proceedings Vol. 4832:
International Optical Design Conference 2002
Paul K. Manhart; Jose M. Sasian, Editor(s)

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