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Proceedings Paper

Inhomogeneous polarization in optical system design
Author(s): Thomas G. Brown
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Paper Abstract

It has long been understood that high numerical aperture optical systems exhibit polarization inhomogeneities in the focal plane. We take a particular interest in high NA systems with illumination which is inhomogeneously polarized in the pupil plane. Such systems may have a variety of different polarization distributions in the image plane; these polarizations need not be transverse to the optical axis, and some of the most interesting cases contain a central diffracion-limited spot which is polarized along the optical axis. This paper will describe experiments demonstrating this type of illumination in imaging and discuss the creative use of inhomogeneously polarized illumination in optical system design, emphasizing applications to microscopy/inspection and lithography.

Paper Details

Date Published: 23 December 2002
PDF: 8 pages
Proc. SPIE 4832, International Optical Design Conference 2002, (23 December 2002); doi: 10.1117/12.486472
Show Author Affiliations
Thomas G. Brown, The Institute of Optics/Univ. of Rochester (United States)

Published in SPIE Proceedings Vol. 4832:
International Optical Design Conference 2002
Paul K. Manhart; Jose M. Sasian, Editor(s)

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