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Proceedings Paper

A fly's eye condenser system for uniform illumination
Author(s): Blake G. Crowther; Donald G. Koch; Joseph M. Kunick; James P. McGuire; Robert Harned; Richard A. Gontin
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Paper Abstract

We recently completed a preliminary design of a novel illumination system. The concept of this design is to integrate the incident irradiance from a small source such that an otherwise non-uniformly iluminated target is uniformly illuminated, while maintaining high radiometric throughput. Our design incorporates a collector to efficiently gather flux from the source, two multi-element faceted arrays, and a flux relay. We explore the concept behind our design and show a preferred embodiment and its predicted peformance.

Paper Details

Date Published: 23 December 2002
PDF: 9 pages
Proc. SPIE 4832, International Optical Design Conference 2002, (23 December 2002); doi: 10.1117/12.486462
Show Author Affiliations
Blake G. Crowther, Optical Research Associates (United States)
Donald G. Koch, D.G.K. Optical Design and Engineering, Inc. (United States)
Joseph M. Kunick, Optical Research Associates (United States)
James P. McGuire, Optical Research Associates (United States)
Robert Harned, Silicon Valley Group (United States)
Richard A. Gontin, ASML (United States)


Published in SPIE Proceedings Vol. 4832:
International Optical Design Conference 2002
Paul K. Manhart; Jose M. Sasian, Editor(s)

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