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Proceedings Paper

Polycrystalline PbSe x-y addressed uncooled FPAs
Author(s): M. Carmen Torquemada; Victor Villamayor; M. T. Rodrigo; German Vergara; Fernando J. Sanchez; Rosa Almazan; Marina Verdu; Purificacion Rodriguez; Luis J. Gomez; Teresa Maria Montojo
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Paper Abstract

A technology for processing low density uncooled focal plane arrays (FPAs) of polycrystalline PbSe has been developed. PbSe is deposited, processed and sensitized on a silicon substrate with two levels of metal separated by a thin dielectric layer of SiO2. An x-y addressed type read out permits a reduced number of leads and high filling factors. Unlike standard polycrystalline PbSe processing method we deposit PbSe by sublimation in vacuum. As-deposited, PbSe is not sensitive to IR light. In order to turn it photosensitive it is necessary to expose the films to specific thermal treatments. We have developed a very efficient sensitization process during which substrates withstand temperatures as high as 450°C. As a technology demonstrator, a low density (8x8 elements) PbSe FPA has been processed. Room temperature detectivities typically yield values of Dλ* (500 K, 300 Hz, 1.2 Hz) approximately 3 x 109 cm Hz1/2/W. The technological capabilities developed can be easily extended to more dense arrays.

Paper Details

Date Published: 10 October 2003
PDF: 8 pages
Proc. SPIE 5074, Infrared Technology and Applications XXIX, (10 October 2003); doi: 10.1117/12.485845
Show Author Affiliations
M. Carmen Torquemada, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Victor Villamayor, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
M. T. Rodrigo, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
German Vergara, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Fernando J. Sanchez, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Rosa Almazan, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Marina Verdu, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Purificacion Rodriguez, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Luis J. Gomez, Ctr. de Investigacion y Desarrollo de la Armada (Spain)
Teresa Maria Montojo, Ctr. de Investigacion y Desarrollo de la Armada (Spain)


Published in SPIE Proceedings Vol. 5074:
Infrared Technology and Applications XXIX
Bjorn F. Andresen; Gabor F. Fulop, Editor(s)

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