Share Email Print
cover

Proceedings Paper

Fast and rigorous three-dimensional mask diffraction simulation using Battle-Lemarie wavelet-based multiresolution time-domain method
Author(s): Michael S. Yeung
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The recently developed multiresolution time-domain (MRTD) method is applied to the rigorous simulation of diffraction from three-dimensional phase-shifting mask structures. The results of a convergence study of MRTD are presented, together with performance benchmarks, for comparison with the finite-difference time-domain (FDTD) method. The results show that MRTD is one order of magnitude faster than FDTD for the same level of accuracy.

Paper Details

Date Published: 26 June 2003
PDF: 9 pages
Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); doi: 10.1117/12.485433
Show Author Affiliations
Michael S. Yeung, Boston Univ. (United States)


Published in SPIE Proceedings Vol. 5040:
Optical Microlithography XVI
Anthony Yen, Editor(s)

© SPIE. Terms of Use
Back to Top