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Proceedings Paper

Fast and rigorous three-dimensional mask diffraction simulation using Battle-Lemarie wavelet-based multiresolution time-domain method
Author(s): Michael S. Yeung
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Paper Abstract

The recently developed multiresolution time-domain (MRTD) method is applied to the rigorous simulation of diffraction from three-dimensional phase-shifting mask structures. The results of a convergence study of MRTD are presented, together with performance benchmarks, for comparison with the finite-difference time-domain (FDTD) method. The results show that MRTD is one order of magnitude faster than FDTD for the same level of accuracy.

Paper Details

Date Published: 26 June 2003
PDF: 9 pages
Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); doi: 10.1117/12.485433
Show Author Affiliations
Michael S. Yeung, Boston Univ. (United States)

Published in SPIE Proceedings Vol. 5040:
Optical Microlithography XVI
Anthony Yen, Editor(s)

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