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Proceedings Paper

Monolithic detector array comprised of >1000 aerial image sensing elements
Author(s): Roderick R. Kunz; Dennis D. Rathman; Steven J. Spector; Michael S. Yeung
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Paper Abstract

A monolithically integrated multi-element photodiode array with 7749 discrete detectors has been fabricated where each sensing element is equipped with a sampling aperture to allow for aerial image measurements with high spatial precision in the focal plane of lithographic lenses. As currently configured, any one of seven 1107-element linear arrays can be used at a given time to allow sampling across the long axis of a scanner lens. The individual elements are located 24 microns apart and are broken down into 27 sets of 41 distinctly different aperture types, with each set spaced 1 mm apart. In addition, the sampling apertures on the device are small enough to allow the device to act as a polarization sensor with high (<50 microns) spatial resolution. The high speed analog output amplifier allows for complete 1107-element images to be obtained at the full repetition rate of lithographic lasers (2KHz).

Paper Details

Date Published: 26 June 2003
PDF: 15 pages
Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); doi: 10.1117/12.485414
Show Author Affiliations
Roderick R. Kunz, MIT Lincoln Lab. (United States)
Dennis D. Rathman, MIT Lincoln Lab. (United States)
Steven J. Spector, MIT Lincoln Lab. (United States)
Michael S. Yeung, Boston Univ. (United States)

Published in SPIE Proceedings Vol. 5040:
Optical Microlithography XVI
Anthony Yen, Editor(s)

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