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Proceedings Paper

Excimer lasers for superhigh NA 193-nm lithography
Author(s): Rainer Paetzel; Hans Stephan Albrecht; Peter Lokai; Wolfgang Zschocke; Thomas Schmidt; Igor Bragin; Thomas Schroeder; Christian Reusch; Stefan Spratte
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Paper Abstract

Excimer lasers are widely used as the light source for microlithography scanners. The volume shipment of scanner systems using 193nm is projected to begin in year 2003. Such tools will directly start with super high numerical aperture (NA) in order to take full advantage of the 193nm wavelength over the advanced 248nm systems. Reliable high repetition rate laser light sources enabling high illumination power and wafer throughput are one of the fundamental prerequisites. In addition these light sources must support a very high NA imaging lens of more than 0.8 which determines the output spectrum of the laser to be less than 0.30 pm FWHM. In this paper we report on our recent progress in the development of high repetition rate ultra-narrow band lasers for high NA 193nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultral Line-narrowed (SOUL) design which yields a bandwidth of less than 0.30pm FWHM. The SOUL laser enables superior optical performance without adding complexity or cost up to the 4 kHz maximum repetition rate. The A4003's high precision line-narrowing optics used in combination with the high repetition rate of 4 kHz yields an output power of 20 W at an extremely narrow spectral bandwidth of less than 0.30 pm FWHM and highest spectral purity of less than 0.75 pm for the 95% energy content. We present performance and reliability data and discuss the key laser parameters. Improvements in the laser-internal metrology and faster regulation control result in better energy stability and improved overall operation behavior. The design considerations for line narrowing and stable laser operation at high repetition rates are discussed.

Paper Details

Date Published: 26 June 2003
PDF: 7 pages
Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); doi: 10.1117/12.485344
Show Author Affiliations
Rainer Paetzel, Lambda Physik AG (Germany)
Hans Stephan Albrecht, Lambda Physik AG (Germany)
Peter Lokai, Lambda Physik AG (Germany)
Wolfgang Zschocke, Lambda Physik AG (Germany)
Thomas Schmidt, Lambda Physik AG (Germany)
Igor Bragin, Lambda Physik AG (Germany)
Thomas Schroeder, Lambda Physik AG (Germany)
Christian Reusch, Lambda Physik AG (Germany)
Stefan Spratte, Lambda Physik AG (Germany)

Published in SPIE Proceedings Vol. 5040:
Optical Microlithography XVI
Anthony Yen, Editor(s)

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