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Proceedings Paper

Improving IC process efficiency with critical materials management
Author(s): Kathy L. Hanson; Robert E. Andrews
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Paper Abstract

The management of critical materials in a high technology manufacturing facility is crucial to obtaining consistently high production yield. This is especially true in an industry like semiconductors where the success of the product is so dependent on the integrity of the critical production materials. Bar code systems, the traditional management tools, are voluntary, defeatable, and do not continuously monitor materials when in use. The significant costs associated with mis-management of chemicals can be captured with a customized model resulting in highly favorable ROI’s for the NOWTrak RFID chemical management system. This system transmits reliable chemical data about each individual container and generates information that can be used to increase wafer production efficiency and yield. The future of the RFID system will expand beyond the benefits of chemical management and into dynamic IC process management

Paper Details

Date Published: 2 July 2003
PDF: 9 pages
Proc. SPIE 5043, Cost and Performance in Integrated Circuit Creation, (2 July 2003); doi: 10.1117/12.485278
Show Author Affiliations
Kathy L. Hanson, ATMI, Inc. (United States)
Robert E. Andrews, ATMI, Inc. (United States)


Published in SPIE Proceedings Vol. 5043:
Cost and Performance in Integrated Circuit Creation
Alfred K. K. Wong; Kevin M. Monahan, Editor(s)

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