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Proceedings Paper

Library-based process test vehicle design framework
Author(s): Kelvin Yih-Yuh Doong; L.-J. Hung; Susan Ho; S. C. Lin; K. L. Young
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Paper Abstract

This work describes a test vehicle design framework, which minimizes the discrepancy among design rule set, tests structure design and testing plan. The framework is composed of the symbolic design rule set, Parametereized-Device, test structure generator, and test vehicle generator. An approach for simplification and consolidation of test structure is proposed to derive the concise test structure library. Finally, implementation of test vehicle is presented.

Paper Details

Date Published: 10 July 2003
PDF: 9 pages
Proc. SPIE 5042, Design and Process Integration for Microelectronic Manufacturing, (10 July 2003); doi: 10.1117/12.485264
Show Author Affiliations
Kelvin Yih-Yuh Doong, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
L.-J. Hung, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Susan Ho, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
S. C. Lin, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
K. L. Young, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)


Published in SPIE Proceedings Vol. 5042:
Design and Process Integration for Microelectronic Manufacturing
Alexander Starikov, Editor(s)

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