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Proceedings Paper

New stream format: progress report on containing data size explosion
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Paper Abstract

The data volumes of individual files used in the manufacture of modern integrated circuits have become unmanageable using existing data formats specifications. The ITRS roadmap indicates that single layer MEBES files in 2002 reached the 50 GB range, worst case. Under the sponsorship of SEMI, a working group was formed to create a new format for use in describing integrated circuit layouts in a more efficient and extendible manner. This paper is a report on the status and potential benefits the new format can deliver.

Paper Details

Date Published: 10 July 2003
PDF: 8 pages
Proc. SPIE 5042, Design and Process Integration for Microelectronic Manufacturing, (10 July 2003); doi: 10.1117/12.485260
Show Author Affiliations
Patrick LaCour, Mentor Graphics Corp. (United States)
Alfred J. Reich, Motorola, Inc. (United States)
Kent H. Nakagawa, DuPont Photomasks, Inc. (United States)
Steffen F. Schulze, Mentor Graphics Corp. (United States)
Laurence Grodd, Mentor Graphics Corp. (United States)


Published in SPIE Proceedings Vol. 5042:
Design and Process Integration for Microelectronic Manufacturing
Alexander Starikov, Editor(s)

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