Share Email Print
cover

Proceedings Paper

Ring-opened maleic anhydride and norbornene copolymers (ROMA) have a good character resist flow process for 193-nm resist technology
Author(s): Hyun-Sang Joo; Dong Chul Seo; Chang Min Kim; Young Taek Lim; Seong Duk Cho; Jong Bum Lee; Hyun Pyo Jeon; Joo Hyeon Park; Jae Chang Jung; Ki Soo Shin; Chul Kyu Bok; Seung-Chan Moon
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We have already reported the resist using a ring opened polymer of maleic anhydride unit (ROMA). The synthesis of the ROMA polymer is as follows: 1)copolymerization of cycloolefin derivatives and maleic anhydride 2)ring opening reaction of maleic anhydride unit. 3)substitution reaction of pendant group. The ROMA Polymer has several good properties such as UV transmittance, pattern profile, PED stability and storage stability. Especially, we have been known that the resist using a ROMA polymer has a good character for application of Resist Flow Process(RFP), recently. The ROMA polymer has shown various Tg value ranging from 100°C to 170°C in accordance with substituents and substituted degree. The resist made by ROMA polymer as a matrix resin showed a good lithographic performance at direct C/H pattern. We also got a good C/H pattern profile by resist flow process at sub-100nm hole size. In this study we will discuss about it and illustrate about various Tg value of ROMA polymers and data gotten by means of resist flow process.

Paper Details

Date Published: 12 June 2003
PDF: 8 pages
Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); doi: 10.1117/12.485209
Show Author Affiliations
Hyun-Sang Joo, Korea Kumho Petrochemical Co., Ltd. (South Korea)
Dong Chul Seo, Korea Kumho Petrochemical Co., Ltd. (South Korea)
Chang Min Kim, Korea Kumho Petrochemical Co., Ltd. (South Korea)
Young Taek Lim, Korea Kumho Petrochemical Co., Ltd. (South Korea)
Seong Duk Cho, Korea Kumho Petrochemical Co., Ltd. (South Korea)
Jong Bum Lee, Korea Kumho Petrochemical Co., Ltd. (South Korea)
Hyun Pyo Jeon, Korea Kumho Petrochemical Co., Ltd. (South Korea)
Joo Hyeon Park, Korea Kumho Petrochemical Co., Ltd. (South Korea)
Jae Chang Jung, Hynix Semiconductor, Inc. (South Korea)
Ki Soo Shin, Hynix Semiconductor, Inc. (South Korea)
Chul Kyu Bok, Hynix Semiconductor, Inc. (South Korea)
Seung-Chan Moon, Hynix Semiconductor, Inc. (South Korea)


Published in SPIE Proceedings Vol. 5039:
Advances in Resist Technology and Processing XX
Theodore H. Fedynyshyn, Editor(s)

© SPIE. Terms of Use
Back to Top