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Proceedings Paper

Modifications to thermophysical behavior in ultrathin polymer films
Author(s): James N. D'Amour; Curtis W. Frank; Uzodinma Okoroanyanwu
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Paper Abstract

Understanding defects in ultrathin polymer films is of great importance to the microelectronics industry. We have taken the approach of trying to understand factors in polymer mobility by changes in glass transition temperature (Tg) and dewetting behavior. Incorporating fullerite into polystyrene (PS) films increased Tg relative to pure films. Photocrosslinkable PS showed a linear decrease in Tg with decreasing film thickness. Pyrene end-tagged polystyrene (PS-Py) and PS (both Mw = 4k) were compared on glass and gold substrates. Fluorescence data gave evidence of a higher probability of pyrene groups in proximity to the gold interface. This change in spatial distribution would be related to increases in Tg and suppression of dewetting for PS-Py films on gold.

Paper Details

Date Published: 12 June 2003
PDF: 12 pages
Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); doi: 10.1117/12.485111
Show Author Affiliations
James N. D'Amour, Stanford Univ. (United States)
Curtis W. Frank, Stanford Univ. (United States)
Uzodinma Okoroanyanwu, Advanced Micro Devices, Inc. (United States)

Published in SPIE Proceedings Vol. 5039:
Advances in Resist Technology and Processing XX
Theodore H. Fedynyshyn, Editor(s)

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