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Proceedings Paper

Copy result exactly using EB-SCOPE technology
Author(s): Keizo Yamada; Takeo Ushiki; Yousuke Itagaki; Robert Newcomb
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Paper Abstract

This paper presents the concept of 'copy result exactly' frameworks using EB-SCOPE technology which must be a powerful tool for coping the best process condition producing ever lasting good contact and via hole.

Paper Details

Date Published: 2 June 2003
PDF: 10 pages
Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); doi: 10.1117/12.485028
Show Author Affiliations
Keizo Yamada, Fab Solutions Inc. (Japan)
Takeo Ushiki, Fab Solutions Inc. (Japan)
Yousuke Itagaki, Fab Solutions Inc. (Japan)
Robert Newcomb, Fab Solutions Inc. (Japan)

Published in SPIE Proceedings Vol. 5038:
Metrology, Inspection, and Process Control for Microlithography XVII
Daniel J. Herr, Editor(s)

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