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Proceedings Paper

Surface and nanometrology: Markov and fractal scale of size properties
Author(s): David J. Whitehouse
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Paper Abstract

The paper explores the effect that a reduction in the scale of size has on performance, manufacture and metrology. It is shown that there are profound changes in which sometimes the meanings of operations and parameters diverge.

Paper Details

Date Published: 29 July 2002
PDF: 17 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484633
Show Author Affiliations
David J. Whitehouse, Univ. of Warwick (United Kingdom)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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