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Proceedings Paper

Noncontact measurements of local distances in partially coherent light
Author(s): Ye. V. Sysoev; I. V. Golubev; Rodion V. Kulikov
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Paper Abstract

The measurement of local distances by use of the interference pattern of partially coherent light is described. A new technique has been proposed for a single-touch measurement of the distance to a object point (a minimum size is not more than 10 ?m) of the object surface with an error of not more than 2 ?m, by reading interference patterns on a single-element photoreceiver. Experimental verification has been carried out, the results are provided.

Paper Details

Date Published: 29 July 2002
PDF: 4 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484608
Show Author Affiliations
Ye. V. Sysoev, Technological Design Institute of Scientific Instrument Engineering (Russia)
I. V. Golubev, Technological Design Institute of Scientific Instrument Engineering (Russia)
Rodion V. Kulikov, Technological Design Institute of Scientific Instrument Engineering (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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