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Proceedings Paper

Laser triangulation systems for sensing mirror surface
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Paper Abstract

An analysis of measurement errors of distance to the surface with narrow scattering indicatrix (mirror surface) by laser triangulation is given. We consider two types of sensors: with output plane orthogonal to the optical axis, and with tilted one (corresponding to the Scheimpflug principle). The conditions of Scheimpflug principle applicability for mirror surface testing are determined. We have shown, that at a certain ratio of parameters of optical system of the sensor to the probing light beam, the sensor with orthogonal plane of photoregistration can provide a smaller level of measurement errors than sensor with tilted output plane, despite the presence of defocusing. These advantages remain valid also at small surface tilts.

Paper Details

Date Published: 29 July 2002
PDF: 6 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484605
Show Author Affiliations
Sergei Vasilievich Mikhlyaev, Institute of Automation and Electrometry (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life

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