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Proceedings Paper

Nonlinearity-free heterodyne laser interferometer
Author(s): TaeBong Eom; Jae Wan Kim; Myung-Sai Chung
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Paper Abstract

A phase encoding electronics capable of compensating the nonlinearity in a heterodyne laser interferometer is described. The system consists of the phase demodulating electronics and the nonlinearity compensating electronics. For phase demodulation, the device uses the phase-quadrature mixing technique. And, for nonlinearity compensation, the offsets, the amplitudes and the phase of two output signals from demodulator are adjusted electrically so that their Lissajous figure can be a circle. As a result, the correct phase can be obtained. The brief analysis of nonlinearity in heterodyne interferometer and the design of the phase encoding electronics are presented. The test was performed in a Michelson-type interferometer using a transverse Zeeman stabilized He-Ne laser. The experiment demonstrates that this method can encode the phase of the heterodyne interferometer with sub-nanometer accuracy.

Paper Details

Date Published: 29 July 2002
PDF: 6 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484570
Show Author Affiliations
TaeBong Eom, Korea Research Institute of Standards and Science (South Korea)
Jae Wan Kim, Korea Research Institute of Standards and Science (Japan)
Myung-Sai Chung, Korea Research Institute of Standards and Science (South Korea)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life

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