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Proceedings Paper

Set of experimental methods for scale-linearity verification in laser interferometers with nanometer resolution
Author(s): Ondrej Cip; Frantisek Petru
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Paper Abstract

We present three methods of scale-linearity verification for high-resolution laser interferometers. Methods are scoped to Michelson type interferometer where detection technique with signals in quadrature supported by a single-frequency He—Ne laser is used. Theory, experimental implementation, and measured results of each method are summarized. A short overview of principle of quadrature detection system and digital correction of the scale non-linearity is included also. The contribution highlights main difficulties arisen from each presented method.

Paper Details

Date Published: 29 July 2002
PDF: 8 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484568
Show Author Affiliations
Ondrej Cip, Institute of Scientific Instruments (Czech Republic)
Frantisek Petru, Institute of Scientific Instruments (Czech Republic)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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