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Proceedings Paper

Nanometrology: problems and solutions
Author(s): V. V. Kalendin
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Paper Abstract

This paper is devoted to consideration of current development of linear measurement metrology in nanometer range — nanometrology, where the problems of measurement instruments in this range are given. On the basis of analysis of possibilities of different methods and means of nanometrology, and also technology of creation and constructions of different measures of small dimensions, recommendations are given to provide the best resolution, stability and measurement error in nanometer range. Results of experimental investigation of etalon measurement system on the basis of scanning probe microscope and laser interferometer-photometer for 3D measurements of linear dimensions with atomic resolution in the real time scale are given. The concept of nanometer metrology is developed.

Paper Details

Date Published: 29 July 2002
PDF: 13 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484566
Show Author Affiliations
V. V. Kalendin, Research Ctr. for Surface and Vacuum Investigation (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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