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Proceedings Paper

Nanopositioning and measuring technique
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Paper Abstract

At the Institute of Process Measurement and Sensor Technology of the TU Ilmenau, a scanning force microscope (measuring range 15 ?m x 75 tm x 15 ?m) having a laser-interferometric 3D-nanomeasuring system free from Abbe errors has been developed in cooperation with the PTB Braunschweig. The extended measuring uncertainty (K =2) is only 0.2 nm and was obtained with a structure standard. To achieve a considerable extension of the measuring range up to 25 mmx 25 mm x 5 mm, a nanopositioning and —measuring machine was developed. The resolution of the measuring axes is 1.24 nm. The laser-interferometric measurement is free from Abbe errors of 1St order in all measuring axes. The deviations of the guides used are compensated by means of a precision mirror corner.

Paper Details

Date Published: 29 July 2002
PDF: 7 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484563
Show Author Affiliations
Gerd Jaeger, Technische Univ. Ilmenau (Germany)
Eberhard Manske, Technische Univ. Ilmenau (Germany)
Tino Hausotte, Technische Univ. Ilmenau (Germany)
Hans-Joachim Buechner, Technische Univ. Ilmenau (Germany)
Rainer Gruenwald, Technische Univ. Ilmenau (Germany)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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