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Proceedings Paper

Scanning probe microscopy for nanotechnology
Author(s): Victor A. Bykov
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Paper Abstract

The review on the contact and noncontact scanning probe techniques for nanoscale operations and control are given in this article. The problems of development of these tools are discussed. The examples of surface images for different materials up to the atomic resolution are presented.

Paper Details

Date Published: 29 July 2002
PDF: 15 pages
Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484562
Show Author Affiliations
Victor A. Bykov, NT-MDT Co. (Russia)


Published in SPIE Proceedings Vol. 4900:
Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life
Yuri V. Chugui; Sergei N. Bagayev; Albert Weckenmann; P. Herbert Osanna, Editor(s)

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